6/7/2012	8:55:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/7/2012	8:55:27 AM	Recipe started at 8:55 AM
6/7/2012	8:55:28 AM	Helium valve closed
6/7/2012	8:55:28 AM	H2 valve closed
6/7/2012	8:55:28 AM	BCl3 valve closed
6/7/2012	8:55:28 AM	PH3 valve closed
6/7/2012	8:55:28 AM	SiCl4 pre valve closed
6/7/2012	8:55:28 AM	SiCl4 post valve closed
6/7/2012	8:55:28 AM	Main Vac valve closed
6/7/2012	8:55:28 AM	Bypass valve closed
6/7/2012	8:55:28 AM	Bubbler valve closed
6/7/2012	8:55:28 AM	Helium MFC set to  0.000000
6/7/2012	8:55:28 AM	H2 MFC set to  0.000000
6/7/2012	8:55:28 AM	BCl3 MFC set to  0.000000
6/7/2012	8:55:28 AM	PH3 MFC set to  0.000000
6/7/2012	8:55:28 AM	SiCl4 MFC set to  0.000000
6/7/2012	8:55:28 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	8:55:28 AM	Tube furnace set to 0
6/7/2012	8:55:31 AM	H2 valve closed
6/7/2012	8:55:31 AM	BCl3 valve closed
6/7/2012	8:55:31 AM	PH3 valve closed
6/7/2012	8:55:31 AM	SiCl4 pre valve closed
6/7/2012	8:55:31 AM	SiCl4 post valve closed
6/7/2012	8:55:31 AM	Main Vac valve closed
6/7/2012	8:55:31 AM	Bypass valve closed
6/7/2012	8:55:31 AM	Bubbler valve closed
6/7/2012	8:55:31 AM	Helium valve opened
6/7/2012	8:55:31 AM	Helium MFC set to  500.000000
6/7/2012	8:55:31 AM	H2 MFC set to  0.000000
6/7/2012	8:55:31 AM	BCl3 MFC set to  0.000000
6/7/2012	8:55:31 AM	PH3 MFC set to  0.000000
6/7/2012	8:55:31 AM	SiCl4 MFC set to  0.000000
6/7/2012	8:55:31 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	8:55:31 AM	Tube furnace set to 0
6/7/2012	8:56:43 AM	Helium valve closed
6/7/2012	8:56:43 AM	H2 valve closed
6/7/2012	8:56:43 AM	BCl3 valve closed
6/7/2012	8:56:44 AM	PH3 valve closed
6/7/2012	8:56:44 AM	SiCl4 pre valve closed
6/7/2012	8:56:44 AM	SiCl4 post valve closed
6/7/2012	8:56:44 AM	Main Vac valve closed
6/7/2012	8:56:44 AM	Bypass valve closed
6/7/2012	8:56:44 AM	Bubbler valve closed
6/7/2012	8:56:44 AM	Helium MFC set to  0.000000
6/7/2012	8:56:44 AM	H2 MFC set to  0.000000
6/7/2012	8:56:44 AM	BCl3 MFC set to  0.000000
6/7/2012	8:56:44 AM	PH3 MFC set to  0.000000
6/7/2012	8:56:44 AM	SiCl4 MFC set to  0.000000
6/7/2012	8:56:44 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	8:56:44 AM	Tube furnace set to 0
6/7/2012	8:56:45 AM	Run finished at 8:56 AM
6/7/2012	8:56:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/7/2012	8:59:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/7/2012	8:59:30 AM	Recipe started at 8:59 AM
6/7/2012	8:59:30 AM	Helium valve closed
6/7/2012	8:59:30 AM	H2 valve closed
6/7/2012	8:59:30 AM	BCl3 valve closed
6/7/2012	8:59:30 AM	PH3 valve closed
6/7/2012	8:59:30 AM	SiCl4 pre valve closed
6/7/2012	8:59:30 AM	SiCl4 post valve closed
6/7/2012	8:59:30 AM	Main Vac valve closed
6/7/2012	8:59:30 AM	Bubbler valve closed
6/7/2012	8:59:30 AM	Bypass valve opened
6/7/2012	8:59:30 AM	Helium MFC set to  0.000000
6/7/2012	8:59:30 AM	H2 MFC set to  0.000000
6/7/2012	8:59:30 AM	BCl3 MFC set to  0.000000
6/7/2012	8:59:30 AM	PH3 MFC set to  0.000000
6/7/2012	8:59:30 AM	SiCl4 MFC set to  0.000000
6/7/2012	8:59:30 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	8:59:30 AM	Tube furnace set to 0
6/7/2012	9:00:36 AM	Helium valve closed
6/7/2012	9:00:36 AM	H2 valve closed
6/7/2012	9:00:36 AM	BCl3 valve closed
6/7/2012	9:00:36 AM	PH3 valve closed
6/7/2012	9:00:36 AM	SiCl4 pre valve closed
6/7/2012	9:00:36 AM	SiCl4 post valve closed
6/7/2012	9:00:36 AM	Main Vac valve closed
6/7/2012	9:00:36 AM	Bubbler valve closed
6/7/2012	9:00:36 AM	Bypass valve opened
6/7/2012	9:00:36 AM	Helium MFC set to  0.000000
6/7/2012	9:00:36 AM	H2 MFC set to  0.000000
6/7/2012	9:00:36 AM	BCl3 MFC set to  0.000000
6/7/2012	9:00:36 AM	PH3 MFC set to  0.000000
6/7/2012	9:00:36 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:00:36 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:00:36 AM	Tube furnace set to 0
6/7/2012	9:01:36 AM	Helium valve closed
6/7/2012	9:01:36 AM	H2 valve closed
6/7/2012	9:01:36 AM	BCl3 valve closed
6/7/2012	9:01:36 AM	PH3 valve closed
6/7/2012	9:01:36 AM	SiCl4 pre valve closed
6/7/2012	9:01:36 AM	SiCl4 post valve closed
6/7/2012	9:01:36 AM	Bypass valve closed
6/7/2012	9:01:36 AM	Bubbler valve closed
6/7/2012	9:01:36 AM	Main Vac valve opened
6/7/2012	9:01:36 AM	Helium MFC set to  0.000000
6/7/2012	9:01:36 AM	H2 MFC set to  0.000000
6/7/2012	9:01:36 AM	BCl3 MFC set to  0.000000
6/7/2012	9:01:36 AM	PH3 MFC set to  0.000000
6/7/2012	9:01:36 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:01:36 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:01:36 AM	Tube furnace set to 0
6/7/2012	9:01:37 AM	Run finished at 9:01 AM
6/7/2012	9:01:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/7/2012	9:03:12 AM	Recipe started at 9:03 AM
6/7/2012	9:03:12 AM	Helium valve closed
6/7/2012	9:03:12 AM	H2 valve closed
6/7/2012	9:03:12 AM	BCl3 valve closed
6/7/2012	9:03:12 AM	PH3 valve closed
6/7/2012	9:03:12 AM	SiCl4 pre valve closed
6/7/2012	9:03:12 AM	SiCl4 post valve closed
6/7/2012	9:03:12 AM	Bypass valve closed
6/7/2012	9:03:12 AM	Bubbler valve closed
6/7/2012	9:03:12 AM	Main Vac valve opened
6/7/2012	9:03:12 AM	Helium MFC set to  0.000000
6/7/2012	9:03:12 AM	H2 MFC set to  0.000000
6/7/2012	9:03:12 AM	BCl3 MFC set to  0.000000
6/7/2012	9:03:12 AM	PH3 MFC set to  0.000000
6/7/2012	9:03:12 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:03:12 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:03:12 AM	Tube furnace set to 0
6/7/2012	9:03:42 AM	H2 valve closed
6/7/2012	9:03:42 AM	BCl3 valve closed
6/7/2012	9:03:42 AM	PH3 valve closed
6/7/2012	9:03:42 AM	SiCl4 pre valve closed
6/7/2012	9:03:42 AM	SiCl4 post valve closed
6/7/2012	9:03:42 AM	Bypass valve closed
6/7/2012	9:03:42 AM	Bubbler valve closed
6/7/2012	9:03:42 AM	Helium valve opened
6/7/2012	9:03:42 AM	Main Vac valve opened
6/7/2012	9:03:42 AM	Helium MFC set to  20.000000
6/7/2012	9:03:42 AM	H2 MFC set to  0.000000
6/7/2012	9:03:42 AM	BCl3 MFC set to  0.000000
6/7/2012	9:03:42 AM	PH3 MFC set to  0.000000
6/7/2012	9:03:42 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:03:42 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:03:42 AM	Tube furnace set to 0
6/7/2012	9:04:12 AM	Helium valve closed
6/7/2012	9:04:12 AM	H2 valve closed
6/7/2012	9:04:12 AM	BCl3 valve closed
6/7/2012	9:04:12 AM	PH3 valve closed
6/7/2012	9:04:12 AM	SiCl4 pre valve closed
6/7/2012	9:04:12 AM	SiCl4 post valve closed
6/7/2012	9:04:12 AM	Bypass valve closed
6/7/2012	9:04:12 AM	Bubbler valve closed
6/7/2012	9:04:12 AM	Main Vac valve opened
6/7/2012	9:04:12 AM	Helium MFC set to  0.000000
6/7/2012	9:04:12 AM	H2 MFC set to  0.000000
6/7/2012	9:04:12 AM	BCl3 MFC set to  0.000000
6/7/2012	9:04:12 AM	PH3 MFC set to  0.000000
6/7/2012	9:04:12 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:04:12 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:04:12 AM	Tube furnace set to 0
6/7/2012	9:04:42 AM	H2 valve closed
6/7/2012	9:04:42 AM	BCl3 valve closed
6/7/2012	9:04:42 AM	PH3 valve closed
6/7/2012	9:04:42 AM	SiCl4 pre valve closed
6/7/2012	9:04:42 AM	SiCl4 post valve closed
6/7/2012	9:04:42 AM	Bypass valve closed
6/7/2012	9:04:42 AM	Bubbler valve closed
6/7/2012	9:04:42 AM	Helium valve opened
6/7/2012	9:04:42 AM	Main Vac valve opened
6/7/2012	9:04:42 AM	Helium MFC set to  20.000000
6/7/2012	9:04:42 AM	H2 MFC set to  0.000000
6/7/2012	9:04:42 AM	BCl3 MFC set to  0.000000
6/7/2012	9:04:42 AM	PH3 MFC set to  0.000000
6/7/2012	9:04:42 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:04:42 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:04:42 AM	Tube furnace set to 0
6/7/2012	9:05:12 AM	Helium valve closed
6/7/2012	9:05:13 AM	H2 valve closed
6/7/2012	9:05:13 AM	BCl3 valve closed
6/7/2012	9:05:13 AM	PH3 valve closed
6/7/2012	9:05:13 AM	SiCl4 pre valve closed
6/7/2012	9:05:13 AM	SiCl4 post valve closed
6/7/2012	9:05:13 AM	Bypass valve closed
6/7/2012	9:05:13 AM	Bubbler valve closed
6/7/2012	9:05:13 AM	Main Vac valve opened
6/7/2012	9:05:13 AM	Helium MFC set to  0.000000
6/7/2012	9:05:13 AM	H2 MFC set to  0.000000
6/7/2012	9:05:13 AM	BCl3 MFC set to  0.000000
6/7/2012	9:05:13 AM	PH3 MFC set to  0.000000
6/7/2012	9:05:13 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:05:13 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:05:13 AM	Tube furnace set to 0
6/7/2012	9:05:43 AM	H2 valve closed
6/7/2012	9:05:43 AM	BCl3 valve closed
6/7/2012	9:05:43 AM	PH3 valve closed
6/7/2012	9:05:43 AM	SiCl4 pre valve closed
6/7/2012	9:05:43 AM	SiCl4 post valve closed
6/7/2012	9:05:43 AM	Bypass valve closed
6/7/2012	9:05:43 AM	Bubbler valve closed
6/7/2012	9:05:43 AM	Helium valve opened
6/7/2012	9:05:43 AM	Main Vac valve opened
6/7/2012	9:05:43 AM	Helium MFC set to  20.000000
6/7/2012	9:05:43 AM	H2 MFC set to  0.000000
6/7/2012	9:05:43 AM	BCl3 MFC set to  0.000000
6/7/2012	9:05:43 AM	PH3 MFC set to  0.000000
6/7/2012	9:05:43 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:05:43 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:05:43 AM	Tube furnace set to 0
6/7/2012	9:06:13 AM	Helium valve closed
6/7/2012	9:06:13 AM	H2 valve closed
6/7/2012	9:06:13 AM	BCl3 valve closed
6/7/2012	9:06:13 AM	PH3 valve closed
6/7/2012	9:06:13 AM	SiCl4 pre valve closed
6/7/2012	9:06:13 AM	SiCl4 post valve closed
6/7/2012	9:06:13 AM	Bypass valve closed
6/7/2012	9:06:13 AM	Bubbler valve closed
6/7/2012	9:06:13 AM	Main Vac valve opened
6/7/2012	9:06:13 AM	Helium MFC set to  0.000000
6/7/2012	9:06:13 AM	H2 MFC set to  0.000000
6/7/2012	9:06:13 AM	BCl3 MFC set to  0.000000
6/7/2012	9:06:13 AM	PH3 MFC set to  0.000000
6/7/2012	9:06:13 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:06:13 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:06:13 AM	Tube furnace set to 0
6/7/2012	9:06:43 AM	H2 valve closed
6/7/2012	9:06:43 AM	BCl3 valve closed
6/7/2012	9:06:43 AM	PH3 valve closed
6/7/2012	9:06:43 AM	SiCl4 pre valve closed
6/7/2012	9:06:43 AM	SiCl4 post valve closed
6/7/2012	9:06:43 AM	Bypass valve closed
6/7/2012	9:06:43 AM	Bubbler valve closed
6/7/2012	9:06:43 AM	Helium valve opened
6/7/2012	9:06:43 AM	Main Vac valve opened
6/7/2012	9:06:43 AM	Helium MFC set to  20.000000
6/7/2012	9:06:43 AM	H2 MFC set to  0.000000
6/7/2012	9:06:43 AM	BCl3 MFC set to  0.000000
6/7/2012	9:06:43 AM	PH3 MFC set to  0.000000
6/7/2012	9:06:43 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:06:43 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:06:43 AM	Tube furnace set to 0
6/7/2012	9:07:13 AM	Helium valve closed
6/7/2012	9:07:13 AM	H2 valve closed
6/7/2012	9:07:13 AM	BCl3 valve closed
6/7/2012	9:07:13 AM	PH3 valve closed
6/7/2012	9:07:13 AM	SiCl4 pre valve closed
6/7/2012	9:07:13 AM	SiCl4 post valve closed
6/7/2012	9:07:13 AM	Bypass valve closed
6/7/2012	9:07:13 AM	Bubbler valve closed
6/7/2012	9:07:13 AM	Main Vac valve opened
6/7/2012	9:07:13 AM	Helium MFC set to  0.000000
6/7/2012	9:07:13 AM	H2 MFC set to  0.000000
6/7/2012	9:07:13 AM	BCl3 MFC set to  0.000000
6/7/2012	9:07:13 AM	PH3 MFC set to  0.000000
6/7/2012	9:07:13 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:07:14 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:07:14 AM	Tube furnace set to 0
6/7/2012	9:07:44 AM	H2 valve closed
6/7/2012	9:07:44 AM	BCl3 valve closed
6/7/2012	9:07:44 AM	PH3 valve closed
6/7/2012	9:07:44 AM	SiCl4 pre valve closed
6/7/2012	9:07:44 AM	SiCl4 post valve closed
6/7/2012	9:07:44 AM	Bypass valve closed
6/7/2012	9:07:44 AM	Bubbler valve closed
6/7/2012	9:07:44 AM	Helium valve opened
6/7/2012	9:07:44 AM	Main Vac valve opened
6/7/2012	9:07:44 AM	Helium MFC set to  20.000000
6/7/2012	9:07:44 AM	H2 MFC set to  0.000000
6/7/2012	9:07:44 AM	BCl3 MFC set to  0.000000
6/7/2012	9:07:44 AM	PH3 MFC set to  0.000000
6/7/2012	9:07:44 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:07:44 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:07:44 AM	Tube furnace set to 0
6/7/2012	9:08:14 AM	Helium valve closed
6/7/2012	9:08:14 AM	H2 valve closed
6/7/2012	9:08:14 AM	BCl3 valve closed
6/7/2012	9:08:14 AM	PH3 valve closed
6/7/2012	9:08:14 AM	SiCl4 pre valve closed
6/7/2012	9:08:14 AM	SiCl4 post valve closed
6/7/2012	9:08:14 AM	Bypass valve closed
6/7/2012	9:08:14 AM	Bubbler valve closed
6/7/2012	9:08:14 AM	Main Vac valve opened
6/7/2012	9:08:14 AM	Helium MFC set to  0.000000
6/7/2012	9:08:14 AM	H2 MFC set to  0.000000
6/7/2012	9:08:14 AM	BCl3 MFC set to  0.000000
6/7/2012	9:08:14 AM	PH3 MFC set to  0.000000
6/7/2012	9:08:14 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:08:14 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:08:14 AM	Tube furnace set to 0
6/7/2012	9:08:44 AM	H2 valve closed
6/7/2012	9:08:44 AM	BCl3 valve closed
6/7/2012	9:08:44 AM	PH3 valve closed
6/7/2012	9:08:44 AM	SiCl4 pre valve closed
6/7/2012	9:08:44 AM	SiCl4 post valve closed
6/7/2012	9:08:44 AM	Bypass valve closed
6/7/2012	9:08:44 AM	Bubbler valve closed
6/7/2012	9:08:44 AM	Helium valve opened
6/7/2012	9:08:44 AM	Main Vac valve opened
6/7/2012	9:08:44 AM	Helium MFC set to  20.000000
6/7/2012	9:08:44 AM	H2 MFC set to  0.000000
6/7/2012	9:08:44 AM	BCl3 MFC set to  0.000000
6/7/2012	9:08:44 AM	PH3 MFC set to  0.000000
6/7/2012	9:08:44 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:08:44 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:08:44 AM	Tube furnace set to 0
6/7/2012	9:09:14 AM	Helium valve closed
6/7/2012	9:09:14 AM	H2 valve closed
6/7/2012	9:09:14 AM	BCl3 valve closed
6/7/2012	9:09:14 AM	PH3 valve closed
6/7/2012	9:09:14 AM	SiCl4 pre valve closed
6/7/2012	9:09:14 AM	SiCl4 post valve closed
6/7/2012	9:09:14 AM	Bypass valve closed
6/7/2012	9:09:14 AM	Bubbler valve closed
6/7/2012	9:09:14 AM	Main Vac valve opened
6/7/2012	9:09:14 AM	Helium MFC set to  0.000000
6/7/2012	9:09:14 AM	H2 MFC set to  0.000000
6/7/2012	9:09:14 AM	BCl3 MFC set to  0.000000
6/7/2012	9:09:14 AM	PH3 MFC set to  0.000000
6/7/2012	9:09:14 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:09:14 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:09:15 AM	Tube furnace set to 0
6/7/2012	9:09:45 AM	H2 valve closed
6/7/2012	9:09:45 AM	BCl3 valve closed
6/7/2012	9:09:45 AM	PH3 valve closed
6/7/2012	9:09:45 AM	SiCl4 pre valve closed
6/7/2012	9:09:45 AM	SiCl4 post valve closed
6/7/2012	9:09:45 AM	Bypass valve closed
6/7/2012	9:09:45 AM	Bubbler valve closed
6/7/2012	9:09:45 AM	Helium valve opened
6/7/2012	9:09:45 AM	Main Vac valve opened
6/7/2012	9:09:45 AM	Helium MFC set to  20.000000
6/7/2012	9:09:45 AM	H2 MFC set to  0.000000
6/7/2012	9:09:45 AM	BCl3 MFC set to  0.000000
6/7/2012	9:09:45 AM	PH3 MFC set to  0.000000
6/7/2012	9:09:45 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:09:45 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:09:45 AM	Tube furnace set to 0
6/7/2012	9:10:15 AM	Helium valve closed
6/7/2012	9:10:15 AM	H2 valve closed
6/7/2012	9:10:15 AM	BCl3 valve closed
6/7/2012	9:10:15 AM	PH3 valve closed
6/7/2012	9:10:15 AM	SiCl4 pre valve closed
6/7/2012	9:10:15 AM	SiCl4 post valve closed
6/7/2012	9:10:15 AM	Bypass valve closed
6/7/2012	9:10:15 AM	Bubbler valve closed
6/7/2012	9:10:15 AM	Main Vac valve opened
6/7/2012	9:10:15 AM	Helium MFC set to  0.000000
6/7/2012	9:10:15 AM	H2 MFC set to  0.000000
6/7/2012	9:10:15 AM	BCl3 MFC set to  0.000000
6/7/2012	9:10:15 AM	PH3 MFC set to  0.000000
6/7/2012	9:10:15 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:10:15 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:10:15 AM	Tube furnace set to 0
6/7/2012	9:10:45 AM	H2 valve closed
6/7/2012	9:10:45 AM	BCl3 valve closed
6/7/2012	9:10:45 AM	PH3 valve closed
6/7/2012	9:10:45 AM	SiCl4 pre valve closed
6/7/2012	9:10:45 AM	SiCl4 post valve closed
6/7/2012	9:10:45 AM	Bypass valve closed
6/7/2012	9:10:45 AM	Bubbler valve closed
6/7/2012	9:10:45 AM	Helium valve opened
6/7/2012	9:10:45 AM	Main Vac valve opened
6/7/2012	9:10:45 AM	Helium MFC set to  20.000000
6/7/2012	9:10:45 AM	H2 MFC set to  0.000000
6/7/2012	9:10:45 AM	BCl3 MFC set to  0.000000
6/7/2012	9:10:45 AM	PH3 MFC set to  0.000000
6/7/2012	9:10:45 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:10:45 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:10:45 AM	Tube furnace set to 0
6/7/2012	9:11:15 AM	Helium valve closed
6/7/2012	9:11:15 AM	H2 valve closed
6/7/2012	9:11:15 AM	BCl3 valve closed
6/7/2012	9:11:15 AM	PH3 valve closed
6/7/2012	9:11:15 AM	SiCl4 pre valve closed
6/7/2012	9:11:15 AM	SiCl4 post valve closed
6/7/2012	9:11:15 AM	Bypass valve closed
6/7/2012	9:11:15 AM	Bubbler valve closed
6/7/2012	9:11:15 AM	Main Vac valve opened
6/7/2012	9:11:15 AM	Helium MFC set to  0.000000
6/7/2012	9:11:15 AM	H2 MFC set to  0.000000
6/7/2012	9:11:15 AM	BCl3 MFC set to  0.000000
6/7/2012	9:11:15 AM	PH3 MFC set to  0.000000
6/7/2012	9:11:15 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:11:15 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:11:16 AM	Tube furnace set to 0
6/7/2012	9:11:46 AM	H2 valve closed
6/7/2012	9:11:46 AM	BCl3 valve closed
6/7/2012	9:11:46 AM	PH3 valve closed
6/7/2012	9:11:46 AM	SiCl4 pre valve closed
6/7/2012	9:11:46 AM	SiCl4 post valve closed
6/7/2012	9:11:46 AM	Bypass valve closed
6/7/2012	9:11:46 AM	Bubbler valve closed
6/7/2012	9:11:46 AM	Helium valve opened
6/7/2012	9:11:46 AM	Main Vac valve opened
6/7/2012	9:11:46 AM	Helium MFC set to  20.000000
6/7/2012	9:11:46 AM	H2 MFC set to  0.000000
6/7/2012	9:11:46 AM	BCl3 MFC set to  0.000000
6/7/2012	9:11:46 AM	PH3 MFC set to  0.000000
6/7/2012	9:11:46 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:11:46 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:11:46 AM	Tube furnace set to 0
6/7/2012	9:12:16 AM	Helium valve closed
6/7/2012	9:12:16 AM	H2 valve closed
6/7/2012	9:12:16 AM	BCl3 valve closed
6/7/2012	9:12:16 AM	PH3 valve closed
6/7/2012	9:12:16 AM	SiCl4 pre valve closed
6/7/2012	9:12:16 AM	SiCl4 post valve closed
6/7/2012	9:12:16 AM	Bypass valve closed
6/7/2012	9:12:16 AM	Bubbler valve closed
6/7/2012	9:12:16 AM	Main Vac valve opened
6/7/2012	9:12:16 AM	Helium MFC set to  0.000000
6/7/2012	9:12:16 AM	H2 MFC set to  0.000000
6/7/2012	9:12:16 AM	BCl3 MFC set to  0.000000
6/7/2012	9:12:16 AM	PH3 MFC set to  0.000000
6/7/2012	9:12:16 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:12:16 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:12:16 AM	Tube furnace set to 200
6/7/2012	9:12:46 AM	H2 valve closed
6/7/2012	9:12:46 AM	BCl3 valve closed
6/7/2012	9:12:46 AM	PH3 valve closed
6/7/2012	9:12:46 AM	SiCl4 pre valve closed
6/7/2012	9:12:46 AM	SiCl4 post valve closed
6/7/2012	9:12:46 AM	Bypass valve closed
6/7/2012	9:12:46 AM	Bubbler valve closed
6/7/2012	9:12:46 AM	Helium valve opened
6/7/2012	9:12:46 AM	Main Vac valve opened
6/7/2012	9:12:46 AM	Helium MFC set to  20.000000
6/7/2012	9:12:46 AM	H2 MFC set to  0.000000
6/7/2012	9:12:46 AM	BCl3 MFC set to  0.000000
6/7/2012	9:12:46 AM	PH3 MFC set to  0.000000
6/7/2012	9:12:46 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:12:46 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:12:46 AM	Tube furnace set to 200
6/7/2012	9:13:16 AM	Helium valve closed
6/7/2012	9:13:16 AM	H2 valve closed
6/7/2012	9:13:16 AM	BCl3 valve closed
6/7/2012	9:13:16 AM	PH3 valve closed
6/7/2012	9:13:16 AM	SiCl4 pre valve closed
6/7/2012	9:13:16 AM	SiCl4 post valve closed
6/7/2012	9:13:16 AM	Bypass valve closed
6/7/2012	9:13:16 AM	Bubbler valve closed
6/7/2012	9:13:16 AM	Main Vac valve opened
6/7/2012	9:13:16 AM	Helium MFC set to  0.000000
6/7/2012	9:13:16 AM	H2 MFC set to  0.000000
6/7/2012	9:13:16 AM	BCl3 MFC set to  0.000000
6/7/2012	9:13:16 AM	PH3 MFC set to  0.000000
6/7/2012	9:13:16 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:13:16 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:13:16 AM	Tube furnace set to 200
6/7/2012	9:13:47 AM	H2 valve closed
6/7/2012	9:13:47 AM	BCl3 valve closed
6/7/2012	9:13:47 AM	PH3 valve closed
6/7/2012	9:13:47 AM	SiCl4 pre valve closed
6/7/2012	9:13:47 AM	SiCl4 post valve closed
6/7/2012	9:13:47 AM	Bypass valve closed
6/7/2012	9:13:47 AM	Bubbler valve closed
6/7/2012	9:13:47 AM	Helium valve opened
6/7/2012	9:13:47 AM	Main Vac valve opened
6/7/2012	9:13:47 AM	Helium MFC set to  20.000000
6/7/2012	9:13:47 AM	H2 MFC set to  0.000000
6/7/2012	9:13:47 AM	BCl3 MFC set to  0.000000
6/7/2012	9:13:47 AM	PH3 MFC set to  0.000000
6/7/2012	9:13:47 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:13:47 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:13:47 AM	Tube furnace set to 200
6/7/2012	9:14:17 AM	Helium valve closed
6/7/2012	9:14:17 AM	H2 valve closed
6/7/2012	9:14:17 AM	BCl3 valve closed
6/7/2012	9:14:17 AM	PH3 valve closed
6/7/2012	9:14:17 AM	SiCl4 pre valve closed
6/7/2012	9:14:17 AM	SiCl4 post valve closed
6/7/2012	9:14:17 AM	Bypass valve closed
6/7/2012	9:14:17 AM	Bubbler valve closed
6/7/2012	9:14:17 AM	Main Vac valve opened
6/7/2012	9:14:17 AM	Helium MFC set to  0.000000
6/7/2012	9:14:17 AM	H2 MFC set to  0.000000
6/7/2012	9:14:17 AM	BCl3 MFC set to  0.000000
6/7/2012	9:14:17 AM	PH3 MFC set to  0.000000
6/7/2012	9:14:17 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:14:17 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:14:17 AM	Tube furnace set to 200
6/7/2012	9:14:47 AM	H2 valve closed
6/7/2012	9:14:47 AM	BCl3 valve closed
6/7/2012	9:14:47 AM	PH3 valve closed
6/7/2012	9:14:47 AM	SiCl4 pre valve closed
6/7/2012	9:14:47 AM	SiCl4 post valve closed
6/7/2012	9:14:47 AM	Bypass valve closed
6/7/2012	9:14:47 AM	Bubbler valve closed
6/7/2012	9:14:47 AM	Helium valve opened
6/7/2012	9:14:47 AM	Main Vac valve opened
6/7/2012	9:14:47 AM	Helium MFC set to  20.000000
6/7/2012	9:14:47 AM	H2 MFC set to  0.000000
6/7/2012	9:14:47 AM	BCl3 MFC set to  0.000000
6/7/2012	9:14:47 AM	PH3 MFC set to  0.000000
6/7/2012	9:14:47 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:14:47 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:14:47 AM	Tube furnace set to 200
6/7/2012	9:15:17 AM	Helium valve closed
6/7/2012	9:15:17 AM	H2 valve closed
6/7/2012	9:15:17 AM	BCl3 valve closed
6/7/2012	9:15:17 AM	PH3 valve closed
6/7/2012	9:15:17 AM	SiCl4 pre valve closed
6/7/2012	9:15:17 AM	SiCl4 post valve closed
6/7/2012	9:15:17 AM	Bypass valve closed
6/7/2012	9:15:17 AM	Bubbler valve closed
6/7/2012	9:15:17 AM	Main Vac valve opened
6/7/2012	9:15:17 AM	Helium MFC set to  0.000000
6/7/2012	9:15:17 AM	H2 MFC set to  0.000000
6/7/2012	9:15:17 AM	BCl3 MFC set to  0.000000
6/7/2012	9:15:17 AM	PH3 MFC set to  0.000000
6/7/2012	9:15:17 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:15:17 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:15:17 AM	Tube furnace set to 200
6/7/2012	9:15:47 AM	H2 valve closed
6/7/2012	9:15:47 AM	BCl3 valve closed
6/7/2012	9:15:47 AM	PH3 valve closed
6/7/2012	9:15:47 AM	SiCl4 pre valve closed
6/7/2012	9:15:47 AM	SiCl4 post valve closed
6/7/2012	9:15:47 AM	Bypass valve closed
6/7/2012	9:15:47 AM	Bubbler valve closed
6/7/2012	9:15:47 AM	Helium valve opened
6/7/2012	9:15:47 AM	Main Vac valve opened
6/7/2012	9:15:47 AM	Helium MFC set to  20.000000
6/7/2012	9:15:48 AM	H2 MFC set to  0.000000
6/7/2012	9:15:48 AM	BCl3 MFC set to  0.000000
6/7/2012	9:15:48 AM	PH3 MFC set to  0.000000
6/7/2012	9:15:48 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:15:48 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:15:48 AM	Tube furnace set to 200
6/7/2012	9:16:18 AM	Helium valve closed
6/7/2012	9:16:18 AM	H2 valve closed
6/7/2012	9:16:18 AM	BCl3 valve closed
6/7/2012	9:16:18 AM	PH3 valve closed
6/7/2012	9:16:18 AM	SiCl4 pre valve closed
6/7/2012	9:16:18 AM	SiCl4 post valve closed
6/7/2012	9:16:18 AM	Bypass valve closed
6/7/2012	9:16:18 AM	Bubbler valve closed
6/7/2012	9:16:18 AM	Main Vac valve opened
6/7/2012	9:16:18 AM	Helium MFC set to  0.000000
6/7/2012	9:16:18 AM	H2 MFC set to  0.000000
6/7/2012	9:16:18 AM	BCl3 MFC set to  0.000000
6/7/2012	9:16:18 AM	PH3 MFC set to  0.000000
6/7/2012	9:16:18 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:16:18 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:16:18 AM	Tube furnace set to 200
6/7/2012	9:16:48 AM	H2 valve closed
6/7/2012	9:16:48 AM	BCl3 valve closed
6/7/2012	9:16:48 AM	PH3 valve closed
6/7/2012	9:16:48 AM	SiCl4 pre valve closed
6/7/2012	9:16:48 AM	SiCl4 post valve closed
6/7/2012	9:16:48 AM	Bypass valve closed
6/7/2012	9:16:48 AM	Bubbler valve closed
6/7/2012	9:16:48 AM	Helium valve opened
6/7/2012	9:16:48 AM	Main Vac valve opened
6/7/2012	9:16:48 AM	Helium MFC set to  20.000000
6/7/2012	9:16:48 AM	H2 MFC set to  0.000000
6/7/2012	9:16:48 AM	BCl3 MFC set to  0.000000
6/7/2012	9:16:48 AM	PH3 MFC set to  0.000000
6/7/2012	9:16:48 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:16:48 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:16:48 AM	Tube furnace set to 200
6/7/2012	9:17:18 AM	Helium valve closed
6/7/2012	9:17:18 AM	H2 valve closed
6/7/2012	9:17:18 AM	BCl3 valve closed
6/7/2012	9:17:18 AM	PH3 valve closed
6/7/2012	9:17:18 AM	SiCl4 pre valve closed
6/7/2012	9:17:18 AM	SiCl4 post valve closed
6/7/2012	9:17:18 AM	Bypass valve closed
6/7/2012	9:17:18 AM	Bubbler valve closed
6/7/2012	9:17:18 AM	Main Vac valve opened
6/7/2012	9:17:18 AM	Helium MFC set to  0.000000
6/7/2012	9:17:18 AM	H2 MFC set to  0.000000
6/7/2012	9:17:18 AM	BCl3 MFC set to  0.000000
6/7/2012	9:17:18 AM	PH3 MFC set to  0.000000
6/7/2012	9:17:18 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:17:18 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:17:18 AM	Tube furnace set to 200
6/7/2012	9:17:48 AM	H2 valve closed
6/7/2012	9:17:48 AM	BCl3 valve closed
6/7/2012	9:17:48 AM	PH3 valve closed
6/7/2012	9:17:48 AM	SiCl4 pre valve closed
6/7/2012	9:17:48 AM	SiCl4 post valve closed
6/7/2012	9:17:48 AM	Bypass valve closed
6/7/2012	9:17:48 AM	Bubbler valve closed
6/7/2012	9:17:48 AM	Helium valve opened
6/7/2012	9:17:48 AM	Main Vac valve opened
6/7/2012	9:17:48 AM	Helium MFC set to  20.000000
6/7/2012	9:17:48 AM	H2 MFC set to  0.000000
6/7/2012	9:17:48 AM	BCl3 MFC set to  0.000000
6/7/2012	9:17:48 AM	PH3 MFC set to  0.000000
6/7/2012	9:17:48 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:17:48 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:17:49 AM	Tube furnace set to 200
6/7/2012	9:18:19 AM	Helium valve closed
6/7/2012	9:18:19 AM	H2 valve closed
6/7/2012	9:18:19 AM	BCl3 valve closed
6/7/2012	9:18:19 AM	PH3 valve closed
6/7/2012	9:18:19 AM	SiCl4 pre valve closed
6/7/2012	9:18:19 AM	SiCl4 post valve closed
6/7/2012	9:18:19 AM	Bypass valve closed
6/7/2012	9:18:19 AM	Bubbler valve closed
6/7/2012	9:18:19 AM	Main Vac valve opened
6/7/2012	9:18:19 AM	Helium MFC set to  0.000000
6/7/2012	9:18:19 AM	H2 MFC set to  0.000000
6/7/2012	9:18:19 AM	BCl3 MFC set to  0.000000
6/7/2012	9:18:19 AM	PH3 MFC set to  0.000000
6/7/2012	9:18:19 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:18:19 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:18:19 AM	Tube furnace set to 0
6/7/2012	9:18:20 AM	Run finished at 9:18 AM
6/7/2012	9:43:43 AM	Recipe started at 9:43 AM
6/7/2012	9:43:43 AM	Helium valve closed
6/7/2012	9:43:43 AM	H2 valve closed
6/7/2012	9:43:43 AM	BCl3 valve closed
6/7/2012	9:43:43 AM	PH3 valve closed
6/7/2012	9:43:43 AM	SiCl4 pre valve closed
6/7/2012	9:43:43 AM	SiCl4 post valve closed
6/7/2012	9:43:43 AM	Bypass valve closed
6/7/2012	9:43:43 AM	Bubbler valve closed
6/7/2012	9:43:43 AM	Main Vac valve opened
6/7/2012	9:43:43 AM	Helium MFC set to  0.000000
6/7/2012	9:43:43 AM	H2 MFC set to  0.000000
6/7/2012	9:43:43 AM	BCl3 MFC set to  0.000000
6/7/2012	9:43:43 AM	PH3 MFC set to  0.000000
6/7/2012	9:43:43 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:43:43 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:43:43 AM	Tube furnace set to 0
6/7/2012	9:44:13 AM	H2 valve closed
6/7/2012	9:44:13 AM	BCl3 valve closed
6/7/2012	9:44:13 AM	PH3 valve closed
6/7/2012	9:44:13 AM	SiCl4 pre valve closed
6/7/2012	9:44:13 AM	SiCl4 post valve closed
6/7/2012	9:44:13 AM	Bypass valve closed
6/7/2012	9:44:13 AM	Bubbler valve closed
6/7/2012	9:44:13 AM	Helium valve opened
6/7/2012	9:44:13 AM	Main Vac valve opened
6/7/2012	9:44:13 AM	Helium MFC set to  20.000000
6/7/2012	9:44:13 AM	H2 MFC set to  0.000000
6/7/2012	9:44:13 AM	BCl3 MFC set to  0.000000
6/7/2012	9:44:13 AM	PH3 MFC set to  0.000000
6/7/2012	9:44:13 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:44:13 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:44:13 AM	Tube furnace set to 0
6/7/2012	9:44:43 AM	Helium valve closed
6/7/2012	9:44:43 AM	H2 valve closed
6/7/2012	9:44:43 AM	BCl3 valve closed
6/7/2012	9:44:43 AM	PH3 valve closed
6/7/2012	9:44:43 AM	SiCl4 pre valve closed
6/7/2012	9:44:43 AM	SiCl4 post valve closed
6/7/2012	9:44:43 AM	Bypass valve closed
6/7/2012	9:44:43 AM	Bubbler valve closed
6/7/2012	9:44:43 AM	Main Vac valve opened
6/7/2012	9:44:43 AM	Helium MFC set to  0.000000
6/7/2012	9:44:43 AM	H2 MFC set to  0.000000
6/7/2012	9:44:43 AM	BCl3 MFC set to  0.000000
6/7/2012	9:44:43 AM	PH3 MFC set to  0.000000
6/7/2012	9:44:43 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:44:43 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:44:44 AM	Tube furnace set to 0
6/7/2012	9:45:14 AM	H2 valve closed
6/7/2012	9:45:14 AM	BCl3 valve closed
6/7/2012	9:45:14 AM	PH3 valve closed
6/7/2012	9:45:14 AM	SiCl4 pre valve closed
6/7/2012	9:45:14 AM	SiCl4 post valve closed
6/7/2012	9:45:14 AM	Bypass valve closed
6/7/2012	9:45:14 AM	Bubbler valve closed
6/7/2012	9:45:14 AM	Helium valve opened
6/7/2012	9:45:14 AM	Main Vac valve opened
6/7/2012	9:45:14 AM	Helium MFC set to  20.000000
6/7/2012	9:45:14 AM	H2 MFC set to  0.000000
6/7/2012	9:45:14 AM	BCl3 MFC set to  0.000000
6/7/2012	9:45:14 AM	PH3 MFC set to  0.000000
6/7/2012	9:45:14 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:45:14 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:45:14 AM	Tube furnace set to 0
6/7/2012	9:45:44 AM	Helium valve closed
6/7/2012	9:45:44 AM	H2 valve closed
6/7/2012	9:45:44 AM	BCl3 valve closed
6/7/2012	9:45:44 AM	PH3 valve closed
6/7/2012	9:45:44 AM	SiCl4 pre valve closed
6/7/2012	9:45:44 AM	SiCl4 post valve closed
6/7/2012	9:45:44 AM	Bypass valve closed
6/7/2012	9:45:44 AM	Bubbler valve closed
6/7/2012	9:45:44 AM	Main Vac valve opened
6/7/2012	9:45:44 AM	Helium MFC set to  0.000000
6/7/2012	9:45:44 AM	H2 MFC set to  0.000000
6/7/2012	9:45:44 AM	BCl3 MFC set to  0.000000
6/7/2012	9:45:44 AM	PH3 MFC set to  0.000000
6/7/2012	9:45:44 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:45:44 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:45:44 AM	Tube furnace set to 0
6/7/2012	9:46:14 AM	H2 valve closed
6/7/2012	9:46:14 AM	BCl3 valve closed
6/7/2012	9:46:14 AM	PH3 valve closed
6/7/2012	9:46:14 AM	SiCl4 pre valve closed
6/7/2012	9:46:14 AM	SiCl4 post valve closed
6/7/2012	9:46:14 AM	Bypass valve closed
6/7/2012	9:46:14 AM	Bubbler valve closed
6/7/2012	9:46:14 AM	Helium valve opened
6/7/2012	9:46:14 AM	Main Vac valve opened
6/7/2012	9:46:14 AM	Helium MFC set to  20.000000
6/7/2012	9:46:14 AM	H2 MFC set to  0.000000
6/7/2012	9:46:14 AM	BCl3 MFC set to  0.000000
6/7/2012	9:46:14 AM	PH3 MFC set to  0.000000
6/7/2012	9:46:14 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:46:14 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:46:14 AM	Tube furnace set to 0
6/7/2012	9:46:44 AM	Helium valve closed
6/7/2012	9:46:44 AM	H2 valve closed
6/7/2012	9:46:44 AM	BCl3 valve closed
6/7/2012	9:46:44 AM	PH3 valve closed
6/7/2012	9:46:44 AM	SiCl4 pre valve closed
6/7/2012	9:46:44 AM	SiCl4 post valve closed
6/7/2012	9:46:44 AM	Bypass valve closed
6/7/2012	9:46:44 AM	Bubbler valve closed
6/7/2012	9:46:44 AM	Main Vac valve opened
6/7/2012	9:46:44 AM	Helium MFC set to  0.000000
6/7/2012	9:46:44 AM	H2 MFC set to  0.000000
6/7/2012	9:46:44 AM	BCl3 MFC set to  0.000000
6/7/2012	9:46:44 AM	PH3 MFC set to  0.000000
6/7/2012	9:46:44 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:46:44 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:46:45 AM	Tube furnace set to 0
6/7/2012	9:47:15 AM	H2 valve closed
6/7/2012	9:47:15 AM	BCl3 valve closed
6/7/2012	9:47:15 AM	PH3 valve closed
6/7/2012	9:47:15 AM	SiCl4 pre valve closed
6/7/2012	9:47:15 AM	SiCl4 post valve closed
6/7/2012	9:47:15 AM	Bypass valve closed
6/7/2012	9:47:15 AM	Bubbler valve closed
6/7/2012	9:47:15 AM	Helium valve opened
6/7/2012	9:47:15 AM	Main Vac valve opened
6/7/2012	9:47:15 AM	Helium MFC set to  20.000000
6/7/2012	9:47:15 AM	H2 MFC set to  0.000000
6/7/2012	9:47:15 AM	BCl3 MFC set to  0.000000
6/7/2012	9:47:15 AM	PH3 MFC set to  0.000000
6/7/2012	9:47:15 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:47:15 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:47:15 AM	Tube furnace set to 0
6/7/2012	9:47:45 AM	Helium valve closed
6/7/2012	9:47:45 AM	H2 valve closed
6/7/2012	9:47:45 AM	BCl3 valve closed
6/7/2012	9:47:45 AM	PH3 valve closed
6/7/2012	9:47:45 AM	SiCl4 pre valve closed
6/7/2012	9:47:45 AM	SiCl4 post valve closed
6/7/2012	9:47:45 AM	Bypass valve closed
6/7/2012	9:47:45 AM	Bubbler valve closed
6/7/2012	9:47:45 AM	Main Vac valve opened
6/7/2012	9:47:45 AM	Helium MFC set to  0.000000
6/7/2012	9:47:45 AM	H2 MFC set to  0.000000
6/7/2012	9:47:45 AM	BCl3 MFC set to  0.000000
6/7/2012	9:47:45 AM	PH3 MFC set to  0.000000
6/7/2012	9:47:45 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:47:45 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:47:45 AM	Tube furnace set to 0
6/7/2012	9:48:15 AM	H2 valve closed
6/7/2012	9:48:15 AM	BCl3 valve closed
6/7/2012	9:48:15 AM	PH3 valve closed
6/7/2012	9:48:15 AM	SiCl4 pre valve closed
6/7/2012	9:48:15 AM	SiCl4 post valve closed
6/7/2012	9:48:15 AM	Bypass valve closed
6/7/2012	9:48:15 AM	Bubbler valve closed
6/7/2012	9:48:15 AM	Helium valve opened
6/7/2012	9:48:15 AM	Main Vac valve opened
6/7/2012	9:48:15 AM	Helium MFC set to  20.000000
6/7/2012	9:48:15 AM	H2 MFC set to  0.000000
6/7/2012	9:48:15 AM	BCl3 MFC set to  0.000000
6/7/2012	9:48:15 AM	PH3 MFC set to  0.000000
6/7/2012	9:48:15 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:48:15 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:48:15 AM	Tube furnace set to 0
6/7/2012	9:48:45 AM	Helium valve closed
6/7/2012	9:48:45 AM	H2 valve closed
6/7/2012	9:48:45 AM	BCl3 valve closed
6/7/2012	9:48:45 AM	PH3 valve closed
6/7/2012	9:48:45 AM	SiCl4 pre valve closed
6/7/2012	9:48:45 AM	SiCl4 post valve closed
6/7/2012	9:48:45 AM	Bypass valve closed
6/7/2012	9:48:45 AM	Bubbler valve closed
6/7/2012	9:48:45 AM	Main Vac valve opened
6/7/2012	9:48:45 AM	Helium MFC set to  0.000000
6/7/2012	9:48:45 AM	H2 MFC set to  0.000000
6/7/2012	9:48:45 AM	BCl3 MFC set to  0.000000
6/7/2012	9:48:45 AM	PH3 MFC set to  0.000000
6/7/2012	9:48:45 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:48:45 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:48:46 AM	Tube furnace set to 0
6/7/2012	9:49:16 AM	H2 valve closed
6/7/2012	9:49:16 AM	BCl3 valve closed
6/7/2012	9:49:16 AM	PH3 valve closed
6/7/2012	9:49:16 AM	SiCl4 pre valve closed
6/7/2012	9:49:16 AM	SiCl4 post valve closed
6/7/2012	9:49:16 AM	Bypass valve closed
6/7/2012	9:49:16 AM	Bubbler valve closed
6/7/2012	9:49:16 AM	Helium valve opened
6/7/2012	9:49:16 AM	Main Vac valve opened
6/7/2012	9:49:16 AM	Helium MFC set to  20.000000
6/7/2012	9:49:16 AM	H2 MFC set to  0.000000
6/7/2012	9:49:16 AM	BCl3 MFC set to  0.000000
6/7/2012	9:49:16 AM	PH3 MFC set to  0.000000
6/7/2012	9:49:16 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:49:16 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:49:16 AM	Tube furnace set to 0
6/7/2012	9:49:46 AM	Helium valve closed
6/7/2012	9:49:46 AM	H2 valve closed
6/7/2012	9:49:46 AM	BCl3 valve closed
6/7/2012	9:49:46 AM	PH3 valve closed
6/7/2012	9:49:46 AM	SiCl4 pre valve closed
6/7/2012	9:49:46 AM	SiCl4 post valve closed
6/7/2012	9:49:46 AM	Bypass valve closed
6/7/2012	9:49:46 AM	Bubbler valve closed
6/7/2012	9:49:46 AM	Main Vac valve opened
6/7/2012	9:49:46 AM	Helium MFC set to  0.000000
6/7/2012	9:49:46 AM	H2 MFC set to  0.000000
6/7/2012	9:49:46 AM	BCl3 MFC set to  0.000000
6/7/2012	9:49:46 AM	PH3 MFC set to  0.000000
6/7/2012	9:49:46 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:49:46 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:49:46 AM	Tube furnace set to 0
6/7/2012	9:50:16 AM	H2 valve closed
6/7/2012	9:50:16 AM	BCl3 valve closed
6/7/2012	9:50:16 AM	PH3 valve closed
6/7/2012	9:50:16 AM	SiCl4 pre valve closed
6/7/2012	9:50:16 AM	SiCl4 post valve closed
6/7/2012	9:50:16 AM	Bypass valve closed
6/7/2012	9:50:16 AM	Bubbler valve closed
6/7/2012	9:50:16 AM	Helium valve opened
6/7/2012	9:50:16 AM	Main Vac valve opened
6/7/2012	9:50:16 AM	Helium MFC set to  20.000000
6/7/2012	9:50:16 AM	H2 MFC set to  0.000000
6/7/2012	9:50:16 AM	BCl3 MFC set to  0.000000
6/7/2012	9:50:16 AM	PH3 MFC set to  0.000000
6/7/2012	9:50:16 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:50:16 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:50:16 AM	Tube furnace set to 0
6/7/2012	9:50:46 AM	Helium valve closed
6/7/2012	9:50:46 AM	H2 valve closed
6/7/2012	9:50:46 AM	BCl3 valve closed
6/7/2012	9:50:46 AM	PH3 valve closed
6/7/2012	9:50:46 AM	SiCl4 pre valve closed
6/7/2012	9:50:46 AM	SiCl4 post valve closed
6/7/2012	9:50:46 AM	Bypass valve closed
6/7/2012	9:50:46 AM	Bubbler valve closed
6/7/2012	9:50:46 AM	Main Vac valve opened
6/7/2012	9:50:46 AM	Helium MFC set to  0.000000
6/7/2012	9:50:46 AM	H2 MFC set to  0.000000
6/7/2012	9:50:46 AM	BCl3 MFC set to  0.000000
6/7/2012	9:50:46 AM	PH3 MFC set to  0.000000
6/7/2012	9:50:46 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:50:46 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:50:46 AM	Tube furnace set to 0
6/7/2012	9:51:16 AM	H2 valve closed
6/7/2012	9:51:16 AM	BCl3 valve closed
6/7/2012	9:51:16 AM	PH3 valve closed
6/7/2012	9:51:16 AM	SiCl4 pre valve closed
6/7/2012	9:51:16 AM	SiCl4 post valve closed
6/7/2012	9:51:16 AM	Bypass valve closed
6/7/2012	9:51:16 AM	Bubbler valve closed
6/7/2012	9:51:16 AM	Helium valve opened
6/7/2012	9:51:17 AM	Main Vac valve opened
6/7/2012	9:51:17 AM	Helium MFC set to  20.000000
6/7/2012	9:51:17 AM	H2 MFC set to  0.000000
6/7/2012	9:51:17 AM	BCl3 MFC set to  0.000000
6/7/2012	9:51:17 AM	PH3 MFC set to  0.000000
6/7/2012	9:51:17 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:51:17 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:51:17 AM	Tube furnace set to 0
6/7/2012	9:51:47 AM	Helium valve closed
6/7/2012	9:51:47 AM	H2 valve closed
6/7/2012	9:51:47 AM	BCl3 valve closed
6/7/2012	9:51:47 AM	PH3 valve closed
6/7/2012	9:51:47 AM	SiCl4 pre valve closed
6/7/2012	9:51:47 AM	SiCl4 post valve closed
6/7/2012	9:51:47 AM	Bypass valve closed
6/7/2012	9:51:47 AM	Bubbler valve closed
6/7/2012	9:51:47 AM	Main Vac valve opened
6/7/2012	9:51:47 AM	Helium MFC set to  0.000000
6/7/2012	9:51:47 AM	H2 MFC set to  0.000000
6/7/2012	9:51:47 AM	BCl3 MFC set to  0.000000
6/7/2012	9:51:47 AM	PH3 MFC set to  0.000000
6/7/2012	9:51:47 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:51:47 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:51:47 AM	Tube furnace set to 0
6/7/2012	9:52:17 AM	H2 valve closed
6/7/2012	9:52:17 AM	BCl3 valve closed
6/7/2012	9:52:17 AM	PH3 valve closed
6/7/2012	9:52:17 AM	SiCl4 pre valve closed
6/7/2012	9:52:17 AM	SiCl4 post valve closed
6/7/2012	9:52:17 AM	Bypass valve closed
6/7/2012	9:52:17 AM	Bubbler valve closed
6/7/2012	9:52:17 AM	Helium valve opened
6/7/2012	9:52:17 AM	Main Vac valve opened
6/7/2012	9:52:17 AM	Helium MFC set to  20.000000
6/7/2012	9:52:17 AM	H2 MFC set to  0.000000
6/7/2012	9:52:17 AM	BCl3 MFC set to  0.000000
6/7/2012	9:52:17 AM	PH3 MFC set to  0.000000
6/7/2012	9:52:17 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:52:17 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:52:17 AM	Tube furnace set to 0
6/7/2012	9:52:47 AM	Helium valve closed
6/7/2012	9:52:47 AM	H2 valve closed
6/7/2012	9:52:47 AM	BCl3 valve closed
6/7/2012	9:52:47 AM	PH3 valve closed
6/7/2012	9:52:47 AM	SiCl4 pre valve closed
6/7/2012	9:52:47 AM	SiCl4 post valve closed
6/7/2012	9:52:47 AM	Bypass valve closed
6/7/2012	9:52:47 AM	Bubbler valve closed
6/7/2012	9:52:47 AM	Main Vac valve opened
6/7/2012	9:52:47 AM	Helium MFC set to  0.000000
6/7/2012	9:52:47 AM	H2 MFC set to  0.000000
6/7/2012	9:52:47 AM	BCl3 MFC set to  0.000000
6/7/2012	9:52:47 AM	PH3 MFC set to  0.000000
6/7/2012	9:52:47 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:52:47 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:52:47 AM	Tube furnace set to 200
6/7/2012	9:53:17 AM	H2 valve closed
6/7/2012	9:53:17 AM	BCl3 valve closed
6/7/2012	9:53:17 AM	PH3 valve closed
6/7/2012	9:53:17 AM	SiCl4 pre valve closed
6/7/2012	9:53:17 AM	SiCl4 post valve closed
6/7/2012	9:53:17 AM	Bypass valve closed
6/7/2012	9:53:17 AM	Bubbler valve closed
6/7/2012	9:53:17 AM	Helium valve opened
6/7/2012	9:53:17 AM	Main Vac valve opened
6/7/2012	9:53:17 AM	Helium MFC set to  20.000000
6/7/2012	9:53:17 AM	H2 MFC set to  0.000000
6/7/2012	9:53:17 AM	BCl3 MFC set to  0.000000
6/7/2012	9:53:17 AM	PH3 MFC set to  0.000000
6/7/2012	9:53:17 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:53:17 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:53:18 AM	Tube furnace set to 200
6/7/2012	9:53:48 AM	Helium valve closed
6/7/2012	9:53:48 AM	H2 valve closed
6/7/2012	9:53:48 AM	BCl3 valve closed
6/7/2012	9:53:48 AM	PH3 valve closed
6/7/2012	9:53:48 AM	SiCl4 pre valve closed
6/7/2012	9:53:48 AM	SiCl4 post valve closed
6/7/2012	9:53:48 AM	Bypass valve closed
6/7/2012	9:53:48 AM	Bubbler valve closed
6/7/2012	9:53:48 AM	Main Vac valve opened
6/7/2012	9:53:48 AM	Helium MFC set to  0.000000
6/7/2012	9:53:48 AM	H2 MFC set to  0.000000
6/7/2012	9:53:48 AM	BCl3 MFC set to  0.000000
6/7/2012	9:53:48 AM	PH3 MFC set to  0.000000
6/7/2012	9:53:48 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:53:48 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:53:48 AM	Tube furnace set to 200
6/7/2012	9:54:18 AM	H2 valve closed
6/7/2012	9:54:18 AM	BCl3 valve closed
6/7/2012	9:54:18 AM	PH3 valve closed
6/7/2012	9:54:18 AM	SiCl4 pre valve closed
6/7/2012	9:54:18 AM	SiCl4 post valve closed
6/7/2012	9:54:18 AM	Bypass valve closed
6/7/2012	9:54:18 AM	Bubbler valve closed
6/7/2012	9:54:18 AM	Helium valve opened
6/7/2012	9:54:18 AM	Main Vac valve opened
6/7/2012	9:54:18 AM	Helium MFC set to  20.000000
6/7/2012	9:54:18 AM	H2 MFC set to  0.000000
6/7/2012	9:54:18 AM	BCl3 MFC set to  0.000000
6/7/2012	9:54:18 AM	PH3 MFC set to  0.000000
6/7/2012	9:54:18 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:54:18 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:54:18 AM	Tube furnace set to 200
6/7/2012	9:54:48 AM	Helium valve closed
6/7/2012	9:54:48 AM	H2 valve closed
6/7/2012	9:54:48 AM	BCl3 valve closed
6/7/2012	9:54:48 AM	PH3 valve closed
6/7/2012	9:54:48 AM	SiCl4 pre valve closed
6/7/2012	9:54:48 AM	SiCl4 post valve closed
6/7/2012	9:54:48 AM	Bypass valve closed
6/7/2012	9:54:48 AM	Bubbler valve closed
6/7/2012	9:54:48 AM	Main Vac valve opened
6/7/2012	9:54:48 AM	Helium MFC set to  0.000000
6/7/2012	9:54:48 AM	H2 MFC set to  0.000000
6/7/2012	9:54:48 AM	BCl3 MFC set to  0.000000
6/7/2012	9:54:48 AM	PH3 MFC set to  0.000000
6/7/2012	9:54:48 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:54:48 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:54:48 AM	Tube furnace set to 200
6/7/2012	9:55:18 AM	H2 valve closed
6/7/2012	9:55:18 AM	BCl3 valve closed
6/7/2012	9:55:18 AM	PH3 valve closed
6/7/2012	9:55:18 AM	SiCl4 pre valve closed
6/7/2012	9:55:18 AM	SiCl4 post valve closed
6/7/2012	9:55:18 AM	Bypass valve closed
6/7/2012	9:55:18 AM	Bubbler valve closed
6/7/2012	9:55:18 AM	Helium valve opened
6/7/2012	9:55:18 AM	Main Vac valve opened
6/7/2012	9:55:18 AM	Helium MFC set to  20.000000
6/7/2012	9:55:18 AM	H2 MFC set to  0.000000
6/7/2012	9:55:18 AM	BCl3 MFC set to  0.000000
6/7/2012	9:55:18 AM	PH3 MFC set to  0.000000
6/7/2012	9:55:18 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:55:18 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:55:19 AM	Tube furnace set to 200
6/7/2012	9:55:49 AM	Helium valve closed
6/7/2012	9:55:49 AM	H2 valve closed
6/7/2012	9:55:49 AM	BCl3 valve closed
6/7/2012	9:55:49 AM	PH3 valve closed
6/7/2012	9:55:49 AM	SiCl4 pre valve closed
6/7/2012	9:55:49 AM	SiCl4 post valve closed
6/7/2012	9:55:49 AM	Bypass valve closed
6/7/2012	9:55:49 AM	Bubbler valve closed
6/7/2012	9:55:49 AM	Main Vac valve opened
6/7/2012	9:55:49 AM	Helium MFC set to  0.000000
6/7/2012	9:55:49 AM	H2 MFC set to  0.000000
6/7/2012	9:55:49 AM	BCl3 MFC set to  0.000000
6/7/2012	9:55:49 AM	PH3 MFC set to  0.000000
6/7/2012	9:55:49 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:55:49 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:55:49 AM	Tube furnace set to 200
6/7/2012	9:56:19 AM	H2 valve closed
6/7/2012	9:56:19 AM	BCl3 valve closed
6/7/2012	9:56:19 AM	PH3 valve closed
6/7/2012	9:56:19 AM	SiCl4 pre valve closed
6/7/2012	9:56:19 AM	SiCl4 post valve closed
6/7/2012	9:56:19 AM	Bypass valve closed
6/7/2012	9:56:19 AM	Bubbler valve closed
6/7/2012	9:56:19 AM	Helium valve opened
6/7/2012	9:56:19 AM	Main Vac valve opened
6/7/2012	9:56:19 AM	Helium MFC set to  20.000000
6/7/2012	9:56:19 AM	H2 MFC set to  0.000000
6/7/2012	9:56:19 AM	BCl3 MFC set to  0.000000
6/7/2012	9:56:19 AM	PH3 MFC set to  0.000000
6/7/2012	9:56:19 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:56:19 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:56:19 AM	Tube furnace set to 200
6/7/2012	9:56:49 AM	Helium valve closed
6/7/2012	9:56:49 AM	H2 valve closed
6/7/2012	9:56:49 AM	BCl3 valve closed
6/7/2012	9:56:49 AM	PH3 valve closed
6/7/2012	9:56:49 AM	SiCl4 pre valve closed
6/7/2012	9:56:49 AM	SiCl4 post valve closed
6/7/2012	9:56:49 AM	Bypass valve closed
6/7/2012	9:56:49 AM	Bubbler valve closed
6/7/2012	9:56:49 AM	Main Vac valve opened
6/7/2012	9:56:49 AM	Helium MFC set to  0.000000
6/7/2012	9:56:49 AM	H2 MFC set to  0.000000
6/7/2012	9:56:49 AM	BCl3 MFC set to  0.000000
6/7/2012	9:56:49 AM	PH3 MFC set to  0.000000
6/7/2012	9:56:49 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:56:49 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:56:49 AM	Tube furnace set to 200
6/7/2012	9:57:19 AM	H2 valve closed
6/7/2012	9:57:19 AM	BCl3 valve closed
6/7/2012	9:57:19 AM	PH3 valve closed
6/7/2012	9:57:19 AM	SiCl4 pre valve closed
6/7/2012	9:57:19 AM	SiCl4 post valve closed
6/7/2012	9:57:19 AM	Bypass valve closed
6/7/2012	9:57:19 AM	Bubbler valve closed
6/7/2012	9:57:19 AM	Helium valve opened
6/7/2012	9:57:19 AM	Main Vac valve opened
6/7/2012	9:57:19 AM	Helium MFC set to  20.000000
6/7/2012	9:57:19 AM	H2 MFC set to  0.000000
6/7/2012	9:57:19 AM	BCl3 MFC set to  0.000000
6/7/2012	9:57:19 AM	PH3 MFC set to  0.000000
6/7/2012	9:57:19 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:57:19 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:57:20 AM	Tube furnace set to 200
6/7/2012	9:57:50 AM	Helium valve closed
6/7/2012	9:57:50 AM	H2 valve closed
6/7/2012	9:57:50 AM	BCl3 valve closed
6/7/2012	9:57:50 AM	PH3 valve closed
6/7/2012	9:57:50 AM	SiCl4 pre valve closed
6/7/2012	9:57:50 AM	SiCl4 post valve closed
6/7/2012	9:57:50 AM	Bypass valve closed
6/7/2012	9:57:50 AM	Bubbler valve closed
6/7/2012	9:57:50 AM	Main Vac valve opened
6/7/2012	9:57:50 AM	Helium MFC set to  0.000000
6/7/2012	9:57:50 AM	H2 MFC set to  0.000000
6/7/2012	9:57:50 AM	BCl3 MFC set to  0.000000
6/7/2012	9:57:50 AM	PH3 MFC set to  0.000000
6/7/2012	9:57:50 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:57:50 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:57:50 AM	Tube furnace set to 200
6/7/2012	9:58:20 AM	H2 valve closed
6/7/2012	9:58:20 AM	BCl3 valve closed
6/7/2012	9:58:20 AM	PH3 valve closed
6/7/2012	9:58:20 AM	SiCl4 pre valve closed
6/7/2012	9:58:20 AM	SiCl4 post valve closed
6/7/2012	9:58:20 AM	Bypass valve closed
6/7/2012	9:58:20 AM	Bubbler valve closed
6/7/2012	9:58:20 AM	Helium valve opened
6/7/2012	9:58:20 AM	Main Vac valve opened
6/7/2012	9:58:20 AM	Helium MFC set to  20.000000
6/7/2012	9:58:20 AM	H2 MFC set to  0.000000
6/7/2012	9:58:20 AM	BCl3 MFC set to  0.000000
6/7/2012	9:58:20 AM	PH3 MFC set to  0.000000
6/7/2012	9:58:20 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:58:20 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:58:20 AM	Tube furnace set to 200
6/7/2012	9:58:50 AM	Helium valve closed
6/7/2012	9:58:50 AM	H2 valve closed
6/7/2012	9:58:50 AM	BCl3 valve closed
6/7/2012	9:58:50 AM	PH3 valve closed
6/7/2012	9:58:50 AM	SiCl4 pre valve closed
6/7/2012	9:58:50 AM	SiCl4 post valve closed
6/7/2012	9:58:50 AM	Bypass valve closed
6/7/2012	9:58:50 AM	Bubbler valve closed
6/7/2012	9:58:50 AM	Main Vac valve opened
6/7/2012	9:58:50 AM	Helium MFC set to  0.000000
6/7/2012	9:58:50 AM	H2 MFC set to  0.000000
6/7/2012	9:58:50 AM	BCl3 MFC set to  0.000000
6/7/2012	9:58:50 AM	PH3 MFC set to  0.000000
6/7/2012	9:58:50 AM	SiCl4 MFC set to  0.000000
6/7/2012	9:58:50 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	9:58:50 AM	Tube furnace set to 0
6/7/2012	9:58:51 AM	Run finished at 9:58 AM
6/7/2012	10:08:29 AM	Main Vac valve closed
6/7/2012	10:08:48 AM	Main Vac valve opened
6/7/2012	10:09:16 AM	Recipe started at 10:09 AM
6/7/2012	10:09:16 AM	Helium valve closed
6/7/2012	10:09:16 AM	H2 valve closed
6/7/2012	10:09:16 AM	BCl3 valve closed
6/7/2012	10:09:16 AM	PH3 valve closed
6/7/2012	10:09:16 AM	SiCl4 pre valve closed
6/7/2012	10:09:16 AM	SiCl4 post valve closed
6/7/2012	10:09:16 AM	Main Vac valve closed
6/7/2012	10:09:16 AM	Bypass valve closed
6/7/2012	10:09:16 AM	Bubbler valve closed
6/7/2012	10:09:16 AM	Helium MFC set to  0.000000
6/7/2012	10:09:16 AM	H2 MFC set to  0.000000
6/7/2012	10:09:16 AM	BCl3 MFC set to  0.000000
6/7/2012	10:09:16 AM	PH3 MFC set to  0.000000
6/7/2012	10:09:16 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:09:16 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:09:16 AM	Tube furnace set to 0
6/7/2012	10:09:19 AM	Helium valve closed
6/7/2012	10:09:19 AM	BCl3 valve closed
6/7/2012	10:09:19 AM	PH3 valve closed
6/7/2012	10:09:19 AM	SiCl4 pre valve closed
6/7/2012	10:09:19 AM	SiCl4 post valve closed
6/7/2012	10:09:19 AM	Main Vac valve closed
6/7/2012	10:09:19 AM	Bypass valve closed
6/7/2012	10:09:19 AM	Bubbler valve closed
6/7/2012	10:09:19 AM	H2 valve opened
6/7/2012	10:09:19 AM	Helium MFC set to  0.000000
6/7/2012	10:09:19 AM	H2 MFC set to  500.000000
6/7/2012	10:09:19 AM	BCl3 MFC set to  0.000000
6/7/2012	10:09:19 AM	PH3 MFC set to  0.000000
6/7/2012	10:09:19 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:09:19 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:09:19 AM	Tube furnace set to 0
6/7/2012	10:10:31 AM	Helium valve closed
6/7/2012	10:10:31 AM	BCl3 valve closed
6/7/2012	10:10:31 AM	PH3 valve closed
6/7/2012	10:10:31 AM	SiCl4 pre valve closed
6/7/2012	10:10:31 AM	SiCl4 post valve closed
6/7/2012	10:10:31 AM	Main Vac valve closed
6/7/2012	10:10:31 AM	Bypass valve closed
6/7/2012	10:10:31 AM	H2 valve opened
6/7/2012	10:10:31 AM	Bubbler valve opened
6/7/2012	10:10:31 AM	Helium MFC set to  0.000000
6/7/2012	10:10:31 AM	H2 MFC set to  500.000000
6/7/2012	10:10:31 AM	BCl3 MFC set to  0.000000
6/7/2012	10:10:31 AM	PH3 MFC set to  0.000000
6/7/2012	10:10:31 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:10:31 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:10:31 AM	Tube furnace set to 0
6/7/2012	10:10:32 AM	Helium valve closed
6/7/2012	10:10:32 AM	BCl3 valve closed
6/7/2012	10:10:32 AM	PH3 valve closed
6/7/2012	10:10:32 AM	SiCl4 pre valve closed
6/7/2012	10:10:32 AM	SiCl4 post valve closed
6/7/2012	10:10:32 AM	Main Vac valve closed
6/7/2012	10:10:32 AM	Bypass valve closed
6/7/2012	10:10:32 AM	H2 valve opened
6/7/2012	10:10:32 AM	Bubbler valve opened
6/7/2012	10:10:32 AM	Helium MFC set to  0.000000
6/7/2012	10:10:32 AM	H2 MFC set to  500.000000
6/7/2012	10:10:32 AM	BCl3 MFC set to  0.000000
6/7/2012	10:10:32 AM	PH3 MFC set to  0.000000
6/7/2012	10:10:32 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:10:32 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:10:32 AM	Tube furnace set to 1000
6/7/2012	10:30:33 AM	Helium valve closed
6/7/2012	10:30:33 AM	BCl3 valve closed
6/7/2012	10:30:33 AM	Main Vac valve closed
6/7/2012	10:30:33 AM	Bypass valve closed
6/7/2012	10:30:33 AM	H2 valve opened
6/7/2012	10:30:33 AM	PH3 valve opened
6/7/2012	10:30:33 AM	SiCl4 pre valve opened
6/7/2012	10:30:33 AM	SiCl4 post valve opened
6/7/2012	10:30:33 AM	Bubbler valve opened
6/7/2012	10:30:33 AM	Helium MFC set to  0.000000
6/7/2012	10:30:33 AM	H2 MFC set to  500.000000
6/7/2012	10:30:33 AM	BCl3 MFC set to  0.000000
6/7/2012	10:30:33 AM	PH3 MFC set to  20.000000
6/7/2012	10:30:33 AM	SiCl4 MFC set to  25.000000
6/7/2012	10:30:33 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:30:33 AM	Tube furnace set to 1000
6/7/2012	10:45:33 AM	Helium valve closed
6/7/2012	10:45:33 AM	BCl3 valve closed
6/7/2012	10:45:33 AM	PH3 valve closed
6/7/2012	10:45:33 AM	SiCl4 pre valve closed
6/7/2012	10:45:33 AM	SiCl4 post valve closed
6/7/2012	10:45:33 AM	Main Vac valve closed
6/7/2012	10:45:33 AM	Bypass valve closed
6/7/2012	10:45:33 AM	H2 valve opened
6/7/2012	10:45:33 AM	Bubbler valve opened
6/7/2012	10:45:33 AM	Helium MFC set to  0.000000
6/7/2012	10:45:33 AM	H2 MFC set to  500.000000
6/7/2012	10:45:33 AM	BCl3 MFC set to  0.000000
6/7/2012	10:45:33 AM	PH3 MFC set to  0.000000
6/7/2012	10:45:33 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:45:33 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:45:33 AM	Tube furnace set to 950
6/7/2012	10:47:33 AM	Helium valve closed
6/7/2012	10:47:33 AM	BCl3 valve closed
6/7/2012	10:47:33 AM	PH3 valve closed
6/7/2012	10:47:33 AM	SiCl4 pre valve closed
6/7/2012	10:47:33 AM	SiCl4 post valve closed
6/7/2012	10:47:33 AM	Main Vac valve closed
6/7/2012	10:47:33 AM	Bypass valve closed
6/7/2012	10:47:33 AM	H2 valve opened
6/7/2012	10:47:33 AM	Bubbler valve opened
6/7/2012	10:47:33 AM	Helium MFC set to  0.000000
6/7/2012	10:47:33 AM	H2 MFC set to  500.000000
6/7/2012	10:47:33 AM	BCl3 MFC set to  0.000000
6/7/2012	10:47:33 AM	PH3 MFC set to  0.000000
6/7/2012	10:47:33 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:47:33 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:47:33 AM	Tube furnace set to 900
6/7/2012	10:49:33 AM	Helium valve closed
6/7/2012	10:49:33 AM	BCl3 valve closed
6/7/2012	10:49:33 AM	PH3 valve closed
6/7/2012	10:49:33 AM	SiCl4 pre valve closed
6/7/2012	10:49:33 AM	SiCl4 post valve closed
6/7/2012	10:49:33 AM	Main Vac valve closed
6/7/2012	10:49:33 AM	Bypass valve closed
6/7/2012	10:49:33 AM	H2 valve opened
6/7/2012	10:49:33 AM	Bubbler valve opened
6/7/2012	10:49:33 AM	Helium MFC set to  0.000000
6/7/2012	10:49:33 AM	H2 MFC set to  500.000000
6/7/2012	10:49:33 AM	BCl3 MFC set to  0.000000
6/7/2012	10:49:33 AM	PH3 MFC set to  0.000000
6/7/2012	10:49:33 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:49:33 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:49:33 AM	Tube furnace set to 850
6/7/2012	10:51:33 AM	H2 valve closed
6/7/2012	10:51:33 AM	BCl3 valve closed
6/7/2012	10:51:33 AM	PH3 valve closed
6/7/2012	10:51:33 AM	SiCl4 pre valve closed
6/7/2012	10:51:33 AM	SiCl4 post valve closed
6/7/2012	10:51:33 AM	Main Vac valve closed
6/7/2012	10:51:33 AM	Bypass valve closed
6/7/2012	10:51:34 AM	Helium valve opened
6/7/2012	10:51:34 AM	Bubbler valve opened
6/7/2012	10:51:34 AM	Helium MFC set to  500.000000
6/7/2012	10:51:34 AM	H2 MFC set to  0.000000
6/7/2012	10:51:34 AM	BCl3 MFC set to  0.000000
6/7/2012	10:51:34 AM	PH3 MFC set to  0.000000
6/7/2012	10:51:34 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:51:34 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:51:34 AM	Tube furnace set to 800
6/7/2012	10:53:34 AM	H2 valve closed
6/7/2012	10:53:34 AM	BCl3 valve closed
6/7/2012	10:53:34 AM	PH3 valve closed
6/7/2012	10:53:34 AM	SiCl4 pre valve closed
6/7/2012	10:53:34 AM	SiCl4 post valve closed
6/7/2012	10:53:34 AM	Main Vac valve closed
6/7/2012	10:53:34 AM	Bypass valve closed
6/7/2012	10:53:34 AM	Helium valve opened
6/7/2012	10:53:34 AM	Bubbler valve opened
6/7/2012	10:53:34 AM	Helium MFC set to  500.000000
6/7/2012	10:53:34 AM	H2 MFC set to  0.000000
6/7/2012	10:53:34 AM	BCl3 MFC set to  0.000000
6/7/2012	10:53:34 AM	PH3 MFC set to  0.000000
6/7/2012	10:53:34 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:53:34 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:53:34 AM	Tube furnace set to 750
6/7/2012	10:55:34 AM	H2 valve closed
6/7/2012	10:55:34 AM	BCl3 valve closed
6/7/2012	10:55:34 AM	PH3 valve closed
6/7/2012	10:55:34 AM	SiCl4 pre valve closed
6/7/2012	10:55:34 AM	SiCl4 post valve closed
6/7/2012	10:55:34 AM	Main Vac valve closed
6/7/2012	10:55:34 AM	Bypass valve closed
6/7/2012	10:55:34 AM	Helium valve opened
6/7/2012	10:55:34 AM	Bubbler valve opened
6/7/2012	10:55:34 AM	Helium MFC set to  500.000000
6/7/2012	10:55:34 AM	H2 MFC set to  0.000000
6/7/2012	10:55:34 AM	BCl3 MFC set to  0.000000
6/7/2012	10:55:34 AM	PH3 MFC set to  0.000000
6/7/2012	10:55:34 AM	SiCl4 MFC set to  0.000000
6/7/2012	10:55:34 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	10:55:34 AM	Tube furnace set to 0
6/7/2012	11:15:34 AM	Helium valve closed
6/7/2012	11:15:34 AM	H2 valve closed
6/7/2012	11:15:34 AM	BCl3 valve closed
6/7/2012	11:15:34 AM	PH3 valve closed
6/7/2012	11:15:34 AM	SiCl4 pre valve closed
6/7/2012	11:15:34 AM	SiCl4 post valve closed
6/7/2012	11:15:34 AM	Main Vac valve closed
6/7/2012	11:15:34 AM	Bypass valve closed
6/7/2012	11:15:34 AM	Bubbler valve closed
6/7/2012	11:15:34 AM	Helium MFC set to  0.000000
6/7/2012	11:15:34 AM	H2 MFC set to  0.000000
6/7/2012	11:15:34 AM	BCl3 MFC set to  0.000000
6/7/2012	11:15:34 AM	PH3 MFC set to  0.000000
6/7/2012	11:15:34 AM	SiCl4 MFC set to  0.000000
6/7/2012	11:15:34 AM	Bypass solenoid MFC set to  0.000000
6/7/2012	11:15:34 AM	Tube furnace set to 0
6/7/2012	11:15:35 AM	Run finished at 11:15 AM
6/7/2012	12:44:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/7/2012	12:44:28 PM	Recipe started at 12:44 PM
6/7/2012	12:44:28 PM	Helium valve closed
6/7/2012	12:44:28 PM	H2 valve closed
6/7/2012	12:44:28 PM	BCl3 valve closed
6/7/2012	12:44:28 PM	PH3 valve closed
6/7/2012	12:44:28 PM	SiCl4 pre valve closed
6/7/2012	12:44:28 PM	SiCl4 post valve closed
6/7/2012	12:44:28 PM	Main Vac valve closed
6/7/2012	12:44:28 PM	Bypass valve closed
6/7/2012	12:44:28 PM	Bubbler valve closed
6/7/2012	12:44:28 PM	Helium MFC set to  0.000000
6/7/2012	12:44:28 PM	H2 MFC set to  0.000000
6/7/2012	12:44:28 PM	BCl3 MFC set to  0.000000
6/7/2012	12:44:28 PM	PH3 MFC set to  0.000000
6/7/2012	12:44:28 PM	SiCl4 MFC set to  0.000000
6/7/2012	12:44:28 PM	Bypass solenoid MFC set to  0.000000
6/7/2012	12:44:28 PM	Tube furnace set to 0
6/7/2012	12:44:31 PM	H2 valve closed
6/7/2012	12:44:31 PM	BCl3 valve closed
6/7/2012	12:44:31 PM	PH3 valve closed
6/7/2012	12:44:31 PM	SiCl4 pre valve closed
6/7/2012	12:44:31 PM	SiCl4 post valve closed
6/7/2012	12:44:31 PM	Main Vac valve closed
6/7/2012	12:44:31 PM	Bypass valve closed
6/7/2012	12:44:31 PM	Bubbler valve closed
6/7/2012	12:44:31 PM	Helium valve opened
6/7/2012	12:44:31 PM	Helium MFC set to  500.000000
6/7/2012	12:44:31 PM	H2 MFC set to  0.000000
6/7/2012	12:44:31 PM	BCl3 MFC set to  0.000000
6/7/2012	12:44:31 PM	PH3 MFC set to  0.000000
6/7/2012	12:44:31 PM	SiCl4 MFC set to  0.000000
6/7/2012	12:44:31 PM	Bypass solenoid MFC set to  0.000000
6/7/2012	12:44:31 PM	Tube furnace set to 0
6/7/2012	12:44:37 PM	Helium valve closed
6/7/2012	12:44:37 PM	H2 valve closed
6/7/2012	12:44:37 PM	BCl3 valve closed
6/7/2012	12:44:37 PM	PH3 valve closed
6/7/2012	12:44:37 PM	SiCl4 pre valve closed
6/7/2012	12:44:37 PM	SiCl4 post valve closed
6/7/2012	12:44:37 PM	Main Vac valve closed
6/7/2012	12:44:37 PM	Bypass valve closed
6/7/2012	12:44:37 PM	Bubbler valve closed
6/7/2012	12:44:37 PM	Helium MFC set to  0.000000
6/7/2012	12:44:37 PM	H2 MFC set to  0.000000
6/7/2012	12:44:37 PM	BCl3 MFC set to  0.000000
6/7/2012	12:44:37 PM	PH3 MFC set to  0.000000
6/7/2012	12:44:37 PM	SiCl4 MFC set to  0.000000
6/7/2012	12:44:37 PM	Bypass solenoid MFC set to  0.000000
6/7/2012	12:44:37 PM	Tube furnace set to 0
6/7/2012	12:44:38 PM	Run finished at 12:44 PM
6/7/2012	12:44:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/7/2012	12:45:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/7/2012	12:45:45 PM	Recipe started at 12:45 PM
6/7/2012	12:45:45 PM	Helium valve closed
6/7/2012	12:45:45 PM	H2 valve closed
6/7/2012	12:45:45 PM	BCl3 valve closed
6/7/2012	12:45:45 PM	PH3 valve closed
6/7/2012	12:45:45 PM	SiCl4 pre valve closed
6/7/2012	12:45:45 PM	SiCl4 post valve closed
6/7/2012	12:45:45 PM	Main Vac valve closed
6/7/2012	12:45:45 PM	Bubbler valve closed
6/7/2012	12:45:45 PM	Bypass valve opened
6/7/2012	12:45:45 PM	Helium MFC set to  0.000000
6/7/2012	12:45:45 PM	H2 MFC set to  0.000000
6/7/2012	12:45:45 PM	BCl3 MFC set to  0.000000
6/7/2012	12:45:45 PM	PH3 MFC set to  0.000000
6/7/2012	12:45:45 PM	SiCl4 MFC set to  0.000000
6/7/2012	12:45:45 PM	Bypass solenoid MFC set to  0.000000
6/7/2012	12:45:45 PM	Tube furnace set to 0
6/7/2012	12:46:51 PM	Helium valve closed
6/7/2012	12:46:51 PM	H2 valve closed
6/7/2012	12:46:51 PM	BCl3 valve closed
6/7/2012	12:46:51 PM	PH3 valve closed
6/7/2012	12:46:51 PM	SiCl4 pre valve closed
6/7/2012	12:46:51 PM	SiCl4 post valve closed
6/7/2012	12:46:51 PM	Main Vac valve closed
6/7/2012	12:46:51 PM	Bubbler valve closed
6/7/2012	12:46:51 PM	Bypass valve opened
6/7/2012	12:46:51 PM	Helium MFC set to  0.000000
6/7/2012	12:46:51 PM	H2 MFC set to  0.000000
6/7/2012	12:46:51 PM	BCl3 MFC set to  0.000000
6/7/2012	12:46:51 PM	PH3 MFC set to  0.000000
6/7/2012	12:46:51 PM	SiCl4 MFC set to  0.000000
6/7/2012	12:46:51 PM	Bypass solenoid MFC set to  0.000000
6/7/2012	12:46:51 PM	Tube furnace set to 0
6/7/2012	12:47:51 PM	Helium valve closed
6/7/2012	12:47:51 PM	H2 valve closed
6/7/2012	12:47:51 PM	BCl3 valve closed
6/7/2012	12:47:51 PM	PH3 valve closed
6/7/2012	12:47:51 PM	SiCl4 pre valve closed
6/7/2012	12:47:51 PM	SiCl4 post valve closed
6/7/2012	12:47:51 PM	Bypass valve closed
6/7/2012	12:47:51 PM	Bubbler valve closed
6/7/2012	12:47:51 PM	Main Vac valve opened
6/7/2012	12:47:51 PM	Helium MFC set to  0.000000
6/7/2012	12:47:51 PM	H2 MFC set to  0.000000
6/7/2012	12:47:51 PM	BCl3 MFC set to  0.000000
6/7/2012	12:47:51 PM	PH3 MFC set to  0.000000
6/7/2012	12:47:51 PM	SiCl4 MFC set to  0.000000
6/7/2012	12:47:51 PM	Bypass solenoid MFC set to  0.000000
6/7/2012	12:47:51 PM	Tube furnace set to 0
6/7/2012	12:47:52 PM	Run finished at 12:47 PM
6/7/2012	12:47:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/7/2012	2:43:12 PM	Main Vac valve closed
6/7/2012	2:43:19 PM	Main Vac valve opened
